The microscopes can be used :
By the members of the lab or partners, after a former training by the platform staff
Under assistance of the platform staff, for a limited number of samples
SEM FEI NovananoSEM 200
Best resolution is about 1 nm in high vacuum mode, while for non-conductive materials, low vacuum mode allows a great image quality with a resolution better than 2 nm, at 15 kV.
In low vac mode (p < 2 mbars-1.5 Torr), dielectric non-conductive samples almost do not need to be metallized.
NovananoSEM is equipped with different detectors :
Everhard Thornley (SEI)
Through the lens detector (TLD) for SEI and BSEI
Gaseous detectors :
- GAD (BSEI)
- LVD (SE at medium magnification)
- Helix (SE for the highest magnifications)
Energy Dispersive Spectroscopy EDAX (SiLi), in high vac and low vac mode
Moreover, a Gatan in-situ tensile test machine is available.