Thin film depositionPhysical Vapour Depostition
DC/RF Sputtering System Alcatel SCM 450 and 650:
Thins films Al , Si, AlN, Ag, Cu, Cr etc. Maximum Substrats 6 inches
Thickness: 20 nm to 500 nm
Joule effect evaporation source: Au, Ag, Ni, Al, Pd, MgF2 etc