Processing substrates

• Annealsys Rapid Thermal Annealing system AS One 100

• Safety drying chambers:Volume 77 litres and 158 litres, 300°C max
  Constant climate chambers: Volume 734 litres, -10°C to 100°C 10% RH to 98% RH

• Oxygen Plasma cleaning:Pico RF PCCE 7 inches