Processing substrates
- Annealsys Rapid Thermal Annealing system AS One 100

- Safety drying chambers:Volume 77 litres and 158 litres, 300°C max
Constant climate chambers: Volume 734 litres, -10°C to 100°C 10% RH to 98% RH

- Oxygen Plasma cleaning:Pico RF PCCE 7 inches
