Processing substrates
- Annealsys Rapid Thermal Annealing system AS One 100
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- Safety drying chambers:Volume 77 litres and 158 litres, 300°C max
Constant climate chambers: Volume 734 litres, -10°C to 100°C 10% RH to 98% RH
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- Oxygen Plasma cleaning:Pico RF PCCE 7 inches
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