PhD defense of Maria Usuga

"Elaboration of micro-nanostructured layers of titanium nitride (TiN) obtained by the process of nitriding sol-gel layers TiO2"

Abstract

« The goal of this thesis is to present a fast and easy method to obtain a micro-nanostructured TiN layer. This process consists on the gas nitridation of a micro-nanostructured layer of TiO₂ obtained by the sol-gel process, using a Rapid Thermal Annealing (RTA) furnace. A photosensitive solution is used for the elaboration of thin layers. This solution can be micro-nanostructured by different lithographic techniques, on flat or cylindrical substrates. In a second step, the nitridation of TiO₂ layers leading to TiN was implemented using an RTA furnace, showing the interest of this process. A proof of concept of plasmonic properties is also described through the realization of a micro-nanostructured TiN layer obtained by the nanoimprinting method exhibiting a plasmon mode excitation (SPR) in the near infrared region »

Committee