Electromagnetic Theory

We develop reference methods for the electromagnetic modelling of 1D and 2D periodic structures (true-mode, Rayleigh), and offer computer tools based on the Generalized Source Method permitting the fast exact modelling of diffractive and scattering elements up to a point where the size of the modelled sub-element represents realistically the optical function of the whole, possibly very large size element such as the diffuser of a flat display, a large NA diffractive lens, or the reticle of a step & repeat camera for the 22 nm node.